An enhancement of high-k/oxide stacked dielectric structure for silicon-based multi-nanowire biosensor in cardiac troponin I detection
| Autor: | Hua Cheng, Shih-Hsiang Shen, I-Shun Wang, Chih-Ting Lin |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Cardiac troponin Metals and Alloys Oxide Nanowire Nanotechnology Dielectric Condensed Matter Physics Fluorescence Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound Membrane chemistry Materials Chemistry Electrical and Electronic Engineering Instrumentation Biosensor High-κ dielectric |
| Zdroj: | Sensors and Actuators B: Chemical. 218:303-309 |
| ISSN: | 0925-4005 |
| Popis: | In this study, we demonstrate a series of multi-channel silicon nanowire (Si-NW) biosensors coated with different high-k dielectric materials for sensing property improvements. To enhance the compatibility to 3-Aminopropyltriethoxysilane (APTES) without any harsh surface treatment, a stacked structure of high-k dielectrics with ultrathin SiO 2 is developed. Fluorescent experiments are employed to verify the enhancement. To experimentally examine the improvement of implemented devices, in addition, an acute myocradial infarction biomarker, cardiac troponin I (cTnI), with different concentrations is used. Based on the experimental results of ultrathin SiO 2 sensing membrane structures stacked with 14 nm Al 2 O 3 and 10 nm HfO 2 , compared with only high-k dielectric devices, the sensing property can be enhanced by 3.8 and 1.4 times, respectively. For the detection of lowest concentration, i.e. 320 fM, the signal enhancement is 20%. Based on this work, the proposed SiO 2 /high-k structure for Si-NW biosensor can be experimentally demonstrates a good potential for future applications in cTnI detections. |
| Databáze: | OpenAIRE |
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