Tunable indium tin oxide for metamaterial perfect absorbers and nonlinear devices
| Autor: | Kevin D. Leedy, Junpeng Guo, Evan M. Smith, Joshua R. Hendrickson, Shivashankar Vangala, Justin W. Cleary |
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| Rok vydání: | 2020 |
| Předmět: |
Fabrication
Materials science Annealing (metallurgy) business.industry Physics::Optics Metamaterial 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Indium tin oxide Condensed Matter::Materials Science Wavelength Sputtering Optoelectronics General Materials Science Thin film 0210 nano-technology business Plasmon |
| Zdroj: | MRS Communications. 10:573-578 |
| ISSN: | 2159-6867 2159-6859 |
| DOI: | 10.1557/mrc.2020.62 |
| Popis: | Indium tin oxide (ITO) has become a very useful plasmonic and nonlinear optical material because of its highly tunable electrical and optical properties and strong optical nonlinearity. In this work, the authors conducted detailed fabrication process studies by using high-temperature reactive sputtering to finely tune the optical properties of ITO thin films, particularly the epsilon-near-zero (ENZ) wavelength in the near and mid-IR spectrum. Sputtered ITO thin films are characterized by using spectroscopic ellipsometry, surface profilometry, Hall measurements, and 4-point probe testing. Additionally, the effect of post-deposition annealing of ITO films is also investigated. |
| Databáze: | OpenAIRE |
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