Arrays of field emission cathode structures with sub-300 nm gates

Autor:	R. G. Musket, R. J. Contolini, A. F. Bernhardt, C. Spindt, R. Barton, A. F. Jankowski, J. Macaulay, J. D. Morse, V. Liberman
Rok vydání:	2000
Předmět:	Fabrication Materials science business.industry General Engineering Ion beam lithography Cathode law.invention Field electron emission law Physics::Accelerator Physics Optoelectronics Microelectronics business Current density Lithography Common emitter
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:1212
ISSN:	0734-211X
Popis:	A novel field emission cathode process has been developed to produce cathode arrays with individual emitter structures having gates with
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46482fafa2c512dd2486ebae8df03981 https://doi.org/10.1116/1.591363 Zobrazit plný text záznamu