Magnetron-like miniature ion source
| Autor: | Tomasz Grzebyk, Piotr Szyszka, Anna Gorecka-Drzazga |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry 010401 analytical chemistry Ultra-high vacuum Miniature mass spectrometer Micropump 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Ion source 0104 chemical sciences Surfaces Coatings and Films Ionization Electrode Cavity magnetron Optoelectronics 0210 nano-technology business Instrumentation |
| Zdroj: | Vacuum. 151:167-174 |
| ISSN: | 0042-207X |
| DOI: | 10.1016/j.vacuum.2018.01.048 |
| Popis: | This paper describes a new type of a miniature ion source (about 0.05 cm3), partially based on the construction of a magnetron but made with the use of the MEMS (Micro-Electro-Mechanical System) technology. Two configurations of the device have been tested: two-electrode, working in low vacuum (from 70 to 0.02 hPa) and three-electrode, operating in a wide range of pressure (from 70 to 10−5 hPa). The gas ionization process takes place only for certain electrode spacings and proper electrodes polarization. For optimal geometry and supply conditions electrons are “trapped” and circulate inside the microdevice, which increases the probability of their collisions with gas particles even in high vacuum. The three-electrode ion source can by further use as a part of a miniature mass spectrometer as well as an ion-sorption micropump or pressure microgauge. |
| Databáze: | OpenAIRE |
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