Diamond-like carbon films prepared by high power impulse magnetron sputtering
| Autor: | Hideki Nakajima, Ponthip Chaiyabin, Thanit Saisopa, Kittikhun Seawsakul, Artit Chingsungnoen, Jidapa Lomon, Narong Chanlek, Nopphon Saowiang, Phitsanu Poolcharuansin, Ratchadaporn Supruangnet, Prayoon Songsiriritthigul |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
X-ray absorption spectroscopy Materials science Diamond-like carbon Analytical chemistry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Carbon film X-ray photoelectron spectroscopy chemistry 0103 physical sciences High-power impulse magnetron sputtering Thin film 0210 nano-technology Carbon Sheet resistance |
| Zdroj: | Materials Today: Proceedings. 17:1549-1554 |
| ISSN: | 2214-7853 |
| Popis: | Diamond-like carbon (DLC) thin films were prepared by high power impulse magnetron sputtering (HiPIMS) with different deposition conditions. The main variable parameters were the argon flow rate, and deposition time. The carbon films were characterized by X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS). The results from the XPS measurements show that the DLC films are composed of two main different carbon species; i.e. carbon with sp3 and sp2 configurations. The XAS measurements reveal that the DLC films contain hydrogen. The present of hydrogen affects the sheet resistivity of the films. The resistance of the DLC films increases exponentially when the temperature decreases. |
| Databáze: | OpenAIRE |
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