| Autor: |
M. N. Benko, E. V. Svichkar, N. K. Nikulin |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
NANOSCIENCE AND NANOTECHNOLOGY: NANO-SciTech. |
| ISSN: |
0094-243X |
| DOI: |
10.1063/1.5122100 |
| Popis: |
In this paper existing methods for characteristics of a molecular-viscous vacuum pump performance calculation were analyzed. Methods for free molecular flow properties calculation in vacuum pumps for molecular flow were considered. Authors proposed mathematical model for calculation Clausing factor. Results were verified with experimental data. Modification of the model will provide universal tool for calculating pumps and complex vacuum systems. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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