Effects of RTA Rising Time on Ferroelectric Characteristics of HfZrO2

Autor:	Changhyeon Han, Seok Jin Kwon, Jiyong Yim, Jeonghan Kim, Sangwoo Kim, Soi Jeong, Eun Chan Park, Ji Won You, Rino Choi, Daewoong Kwon
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Electron Devices. 69:3499-3502
ISSN:	1557-9646 0018-9383
DOI:	10.1109/ted.2022.3168237
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::413e44d0ec22b220d149dc5459eaad0c https://doi.org/10.1109/ted.2022.3168237 Zobrazit plný text záznamu