Design and characterization of a plasma chamber for improved radial and axial film uniformity
| Autor: | Sally L. McArthur, Karyn L. Jarvis, Racim Radjef, Bronwyn Fox |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Polymers and Plastics Analytical chemistry 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Plasma polymerization 0104 chemical sciences Characterization (materials science) symbols.namesake chemistry.chemical_compound chemistry Plasma chamber Ellipsometry symbols Langmuir probe 0210 nano-technology Acrylic acid |
| Zdroj: | Plasma Processes and Polymers. 17:2000017 |
| ISSN: | 1612-8869 1612-8850 |
| DOI: | 10.1002/ppap.202000017 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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