Si-rich a-Si1−xCx thin films by d.c. magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties
| Autor: | Aissa Keffous, Yacine Boukennous, Y. Belkacem, T. Hadjersi, Amer Brighet, A. Boukezzata, Noureddine Gabouze, Hamid Menari, A. Cheriet, Mohamed Kechouane, M.A. Ouadfel |
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| Rok vydání: | 2013 |
| Předmět: |
Amorphous silicon
Materials science Silicon Analytical chemistry General Physics and Astronomy Infrared spectroscopy chemistry.chemical_element Surfaces and Interfaces General Chemistry Sputter deposition Condensed Matter Physics Surfaces Coatings and Films Carbide symbols.namesake chemistry.chemical_compound chemistry Sputtering symbols Raman spectroscopy Carbon |
| Zdroj: | Applied Surface Science. 265:94-100 |
| ISSN: | 0169-4332 |
| Popis: | Si-rich hydrogenated amorphous silicon carbide (a-Si1−xCx:H) thin films with different carbon fractions were elaborated by a d.c. magnetron sputtering system. Their structural and optical properties were investigated by UV–visible spectrophotometry, infrared spectroscopy (FTIR), secondary ion mass spectroscopy (SIMS), Raman spectroscopy and photoluminescence (PL). The results show that the increase in the carbon fraction induces an increase in the optical gap (Eg) up to a maximum value of 2.53 eV, corresponding to a carbon fraction (x) of 0.25, and then Eg decreases to 1.76 eV corresponding to a carbon fraction x = 0.33. |
| Databáze: | OpenAIRE |
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