Quantitative evaluation of high-energy O−ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target
| Autor: | Hansin Bae, Hirotaka Toyoda, Hayato Ogawa, Taku Suyama, Kenta Setaka, Haruka Suzuki, Yushi Fukuoka |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
High energy Materials science Acoustics and Ultrasonics Analytical chemistry 02 engineering and technology Plasma 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Indium tin oxide Ion Sputtering 0103 physical sciences Cavity magnetron 0210 nano-technology Particle flux |
| Zdroj: | Journal of Physics D: Applied Physics. 50:445201 |
| ISSN: | 1361-6463 0022-3727 |
| DOI: | 10.1088/1361-6463/aa87a1 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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