Enhanced catalyst mobility in chemically amplified resists

Autor:	Christopher M. Bottoms, Tanguy Terlier, Gila E. Stein, Manolis Doxastakis
Rok vydání:	2022
Zdroj:	Advances in Patterning Materials and Processes XXXIX.
DOI:	10.1117/12.2613355
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3d0767ce566dc298e3efefa50a745c64 https://doi.org/10.1117/12.2613355 Zobrazit plný text záznamu