Characterization of LiNb1−xTaxO3 composition-spread thin film by the scanning microwave microscope
| Autor: | Hideomi Koinuma, Noriaki Okazaki, Hiroko Higuma, Masashi Kawasaki, Yuji Matsumoto, Yasuo Cho, Tomoteru Fukumura, Sohei Okazaki, Tetsuya Hasegawa, Shoji Miyashita, Yukio Yamamoto, Makoto Murakami, Jun Nishimura |
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| Rok vydání: | 2004 |
| Předmět: |
Permittivity
Microscope Materials science Analytical chemistry General Physics and Astronomy Surfaces and Interfaces General Chemistry Dielectric Condensed Matter Physics Surfaces Coatings and Films law.invention Pulsed laser deposition chemistry.chemical_compound Crystallinity chemistry law Lithium tantalate Thin film Microwave |
| Zdroj: | Applied Surface Science. 223:196-199 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/s0169-4332(03)00916-4 |
| Popis: | Dielectric property of a composition-spread LiNb 1-x Ta x O 3 thin film, fabricated by the combinatorial pulsed-laser deposition (PLD) method, was systematically characterized by the scanning microwave microscope (SμM). Measured frequency shift showed a broad maximum around x = 0.2-0.5, and gradually decreased with x, resulting in a lower dielectric constant in the LiTaO 3 side compared to the LiNbO 3 side. The trend of frequency shift has been revealed to possess a strong correlation with the sharpness of XRD peak, suggesting that lowering of dielectric constant is principally brought about by the degradation of crystallinity. |
| Databáze: | OpenAIRE |
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