Characteristics of discharge and beyond extreme ultraviolet spectra of laser induced discharge gadolinium plasma
| Autor: | zuo du-luo, Wang Xinbing, Vassily S. Zakharov, Wang Junwu |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
02 engineering and technology Plasma Radiation 021001 nanoscience & nanotechnology medicine.disease_cause Laser 01 natural sciences Atomic and Molecular Physics and Optics Cathode Electronic Optical and Magnetic Materials law.invention Anode law Extreme ultraviolet 0103 physical sciences medicine Electron temperature Electrical and Electronic Engineering Atomic physics 010306 general physics 0210 nano-technology Ultraviolet |
| Zdroj: | Optics & Laser Technology. 138:106904 |
| ISSN: | 0030-3992 |
| DOI: | 10.1016/j.optlastec.2020.106904 |
| Popis: | The gadolinium (Gd) plasma is a potential beyond-EUV (BEUV) source for the extension of extreme ultraviolet lithography at 13.5 nm. A laser induced discharge plasma (LDP) is an effective way to excite the target material into high temperature plasma. A pulsed CO2 laser ablates a Gd plate cathode and produces an initial plasma, triggers a discharge between a Gd plate cathode and a stainless-steel cone anode, the current produces high temperature discharge plasma and creates an environment for BEUV radiation. A RLC model is used to estimate the equivalent circuit resistance and inductance, the resistance is about 0.70–0.75 Ω and the inductance is about 2.3–2.4 μH. A grazing incident ultraviolet spectrometer is established to study the Gd plasma’s BEUV radiation. With the laser energy above 120 mJ and voltage above 6.7 kV, Gd plasma spectra near the 6.7 nm is obtained. It is found that the relative spectral intensity increases and the peak of emission moves to a shorter wavelength corresponding to a higher voltage and laser energy. An atomic code combined with a simplified collisional-radiative model is used to calculate the theoretical spectra and estimate the electron temperature and density range of the LDP plasma. |
| Databáze: | OpenAIRE |
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