| Autor: |
Yohei Torigoe, Adam Lyons, Dai Tsunoda, Yasuaki Horima, Brian Dillon, Kurt E. Wampler, Tom Wallow, Zhang Quan, Vincent Shu |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
Photomask Technology 2020. |
| Popis: |
MPC computation time is basically in proportional to the number of vertices in the layout. ILT free form may have up to 15 times more vertices than conventional OPC output, which may lead to the ballooning of MPC processing time. Novel data simplification technique for ILT input has been developed. Simulation based verification will be presented. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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