Physical Features of the Functioning of a Planar Magnetron Sputter with a Thermally Insulated, Discharge-Heated Target for Boron Coating Deposition
| Autor: | A. V. Vizir, A. G. Nikolaev, E. M. Oks, V. P. Frolova, A. A. Cherkasov, M. V. Shandrikov, G. Yu. Yushkov |
|---|---|
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Russian Physics Journal. 64:2177-2184 |
| ISSN: | 1573-9228 1064-8887 |
| DOI: | 10.1007/s11182-022-02574-9 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|