| Autor: |
K. Mutamba, H.L. Hartnagel |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
Proceedings. International Semiconductor Conference. |
| DOI: |
10.1109/smicnd.2002.1105790 |
| Popis: |
This work deals with contributions related to the use of micromachining technologies in the development of RF MEMS devices. Recent device developments involving III-V compound semiconductor MEMS technology are presented in connection with RF power measurement and the prospects of microwave power generation on the basis of micromachined lateral field-emitters. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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