CMOS Control Circuit for Robust MEMS Varactors
| Autor: | V. Gholizadeh, Zhibo Cao, Renfeng Jin, Guanghai Ding, Herman F. Nied, James C. M. Hwang, Charles L. Goldsmith, Mohammad Javad Asadi |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Dynamic range 020208 electrical & electronic engineering 020206 networking & telecommunications Biasing 02 engineering and technology Capacitance Resonator CMOS Robustness (computer science) 0202 electrical engineering electronic engineering information engineering Optoelectronics business Varicap |
| Zdroj: | 2019 IEEE Asia-Pacific Microwave Conference (APMC). |
| DOI: | 10.1109/apmc46564.2019.9038853 |
| Popis: | A CMOS closed-loop control circuit was designed, fabricated, and tested for order-of-magnitude improvement of the robustness of a MEMS varactor against ambient temperature change. The control is based on real-time sensing of the capacitance of the MEMS varactor and fine-tuning its bias voltage according to the difference between the sensed and targeted capacitances. Simulation shows that this difference can be sensed with femtofarad sensitivity and a linear output over a piccofarad dynamic range. Measurement shows that, in a hybrid integration of the CMOS control circuit and the MEMS varactor, the varactor capacitance can be kept within ±2% of the targeted value despite a temperature change from 25°C to 80 °C. When the MEMS varactor is used as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit can maintain the resonance frequency within ±0.08% over the temperature variation. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|