Improved passivation performance of Al2O3 interlayer/MoOX thin films continuously grown via atomic layer deposition

Autor:	Minji Jeong, Jihye Park, Young Joon Cho, Hyo Sik Chang
Rok vydání:	2023
Předmět:	Materials Chemistry Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Thin Solid Films. 766:139667
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2022.139667
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::33692ba886927d694adae044da828403 https://doi.org/10.1016/j.tsf.2022.139667 Zobrazit plný text záznamu Full Text from ScienceDirect