Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology
| Autor: | Lehninger, David, Mähne, H., Ali, Tarek Nadi Ismail, Hoffmann, Raik, Revello Olivo, Ricardo Orlando, Lederer, Maximilian |
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| Rok vydání: | 2022 |
| DOI: | 10.24406/h-427200 |
| Databáze: | OpenAIRE |
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