Low Resistivity C54 Phase TiSi 2 Films Synthesized by a Novel Two-Step Method

Autor:	LI Dan-Feng, Yue Shuang-Lin, Guo Cai-Xin, Gu Chang-Zhi, HU Chang-Wen
Rok vydání:	2003
Předmět:	Materials science Sputtering Electrical resistivity and conductivity Scanning electron microscope Phase (matter) Surface roughness Analytical chemistry General Physics and Astronomy Chemical vapor deposition Atmospheric temperature range Thin film
Zdroj:	Chinese Physics Letters. 20:1329-1332
ISSN:	1741-3540 0256-307X
DOI:	10.1088/0256-307x/20/8/343
Popis:	Synthesis and growth properties of the TiSi2 film on a Si (001) substrate are investigated. A novel two-step method is used for deposition of the C54 phase TiSi2 film with low resistivity. The first step is the formation of the C49 phase TiSi2 at a relative low substrate temperature of 400 C, followed by rapid thermal annealing process at 850degrees C in N-2 for the formation of the C54 phase TiSi2 as the second step. Finally, selective wet, etching is employed to remove the un-reaction Ti on the surface and the low resistivity C54 TiSi2 film can be obtained. The films deposited under various parameters are evaluated by scanning electron microscopy, x-ray diffraction and the resistivity measurement. Compared with other sputtering technologies used commonly for TiSi2 synthesis, this two-step method has apparent advantages such as the mild synthesis temperature and the high purity of the final product with low resistivity, uniform large area and improving surface roughness. In addition, the film also shows that the low coefficient of resistivity-temperature appears in the temperature range from 20degrees C to 800degrees C.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::30cb7c179d046e251cbe7a8c67a87423 https://doi.org/10.1088/0256-307x/20/8/343 Zobrazit plný text záznamu