Dissociative Adsorption Mechanism of Product Gas in W-CVD Revealed by Molecular Orbital Calculation and Its Determinant Role in Filling Features
| Autor: | Takuya Maruizumi, Yoshiaki Takemura, Nobuyoshi Kobayashi, Ryotaro Irie, Jiro Ushio |
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| Rok vydání: | 1995 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.1995.s-iv-2 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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