The Effect of High-Pressure Hydrogen or Deuterium Annealing on Electrical Performance of Indium Gallium Zinc Oxide Thin-Film Transistors

Autor: An Hoang-Thuy Nguyen, Manh-Cuong Nguyen, Anh-Duy Nguyen, No-Hwal Park, Seung Joon Jeon, Daewoong Kwon, Rino Choi
Rok vydání: 2023
Předmět:
Zdroj: IEEE Transactions on Electron Devices. 70:1085-1088
ISSN: 1557-9646
0018-9383
DOI: 10.1109/ted.2023.3241119
Databáze: OpenAIRE