A gel-based wafer-level testing procedure for microelectrodes
| Autor: | Maria Kindlundh, Peter Norlin |
|---|---|
| Rok vydání: | 2005 |
| Předmět: |
Materials science
Metals and Alloys Analytical chemistry Electrolyte Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Gel based Microelectrode Reference measurement Biomedical microsystems Electrode Materials Chemistry Wafer Electrical and Electronic Engineering Instrumentation Electrical impedance Biomedical engineering |
| Zdroj: | Sensors and Actuators B: Chemical. 107:557-562 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2004.11.016 |
| Popis: | In this study, we demonstrate a novel impedance measurement procedure for microelectrodes. The concept is based on the use of a saline gel and enables relatively quick measurement at wafer level. In order to verify the procedure, measurements were first carried out with a saline gel as electrolyte, and then compared to a reference measurement in a conventional saline solution. The impedance as function of frequency was investigated for two different electrode sizes, and showed good agreement between the two types of electrolytes. The testing procedure described in this paper can be applied at wafer level to biomedical microsystems that must interact with a wet environment. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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