High-Q 3D RF solenoid inductors in glass
| Autor: | Ravindra Vaman Shenoy, Jonghae Kim, Kwan-Yu Lai, Jitae Kim |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Fabrication
Materials science Physics::Instrumentation and Detectors business.industry Electrical engineering Solenoid Topology (electrical circuits) Substrate (electronics) Physics::Classical Physics Inductor Condensed Matter::Disordered Systems and Neural Networks Computer Science::Other Core (optical fiber) Inductance Copper plating Physics::Accelerator Physics Optoelectronics business |
| Zdroj: | 2014 IEEE Radio Frequency Integrated Circuits Symposium. |
| DOI: | 10.1109/rfic.2014.6851696 |
| Popis: | In this paper, we demonstrate the fabrication and characterization of various 3D solenoid inductors using a glass core substrate. Solenoid inductors were fabricated in glass by drilling through holes in glass and semi-additive copper plating for metallization. This topology is compared to similar solenoid structures in terms of Q-factor performance and inductance density. Inductances of 1.8-4.5nH with Q ~ 60 at 1GHz were demonstrated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|