Ion current optimization in a magnetron with tunable magnetic field configuration

Autor:	N S Sergeev, D G Ageychenkov, M. M. Kharkov, D. V. Kolodko, Andrey V. Kaziev, K. A. Leonova, A. V. Tumarkin
Rok vydání:	2021
Předmět:	History Materials science business.industry Cavity magnetron Optoelectronics Ion current business Computer Science Applications Education Magnetic field
Zdroj:	Journal of Physics: Conference Series. 2064:012061
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/2064/1/012061
Popis:	The response of the ion current in the substrate region to the magnetic system configuration of a circular magnetron was studied during direct current sputtering of aluminum target. The unbalancing degree induced by changing of magnets’ positions was modelled with finite element methods. The ion saturation current in the substrate region showed more than twofold variation with unbalancing degree in the range 0.6–1.2. The dependence was non-monotonic, and the system was optimized to maximize the substrate ion current. The Langmuir probe diagnostics showed plasma density ~ 1016 m−3 in the optimized magnetic configuration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2a1e432889c50575bcd83f99456ce9b8 https://doi.org/10.1088/1742-6596/2064/1/012061 Zobrazit plný text záznamu