Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition
| Autor: | Xiaodong Wang, Jin Yu, Wang Jinduo, Shoujun Dai, Jingjing Meng, Mo Zeqiang, He Jianguo |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Pulsed laser Materials science Picosecond pulsed laser business.industry chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces Surface finish 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films chemistry Molybdenum 0103 physical sciences Homogeneity (physics) Optoelectronics Thin film 0210 nano-technology business Radiant intensity |
| Zdroj: | Journal of Vacuum Science & Technology A. 37:061506 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.5113970 |
| Popis: | An approach to achieve uniform and smooth molybdenum (Mo) film on a BK7 glass plate at room temperature is proposed through picosecond pulsed laser deposition, with the pulsed laser radiating the target along a linear track. A numerical model is established to analyze the influence of linear scanning offsets on the thickness homogeneity of the deposited thin film. Through an appropriate choice of radiation intensity and scanning parameters, a uniform and smooth layer of Mo thin film is prepared with its maximum thickness variation and root-mean-square roughness better than 5% and 1.2 nm, respectively.An approach to achieve uniform and smooth molybdenum (Mo) film on a BK7 glass plate at room temperature is proposed through picosecond pulsed laser deposition, with the pulsed laser radiating the target along a linear track. A numerical model is established to analyze the influence of linear scanning offsets on the thickness homogeneity of the deposited thin film. Through an appropriate choice of radiation intensity and scanning parameters, a uniform and smooth layer of Mo thin film is prepared with its maximum thickness variation and root-mean-square roughness better than 5% and 1.2 nm, respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|