A T-Shaped Mems Differential Resonant Accelerometer with Module-Base Demonstration of >134 Db Dynamic Range and <1 Mdeg Absolute Tilt Angle Precision
| Autor: | Kei Masunishi, Etsuji Ogawa, Ryunosuke Gando, Daiki Ono, Shiori Kaji, Fumito Miyazaki, Hiroki Hiraga, Kenga Uchida, Yasushi Tomizawa |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). |
| DOI: | 10.1109/mems51670.2022.9699761 |
| Databáze: | OpenAIRE |
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