TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication

Autor:	Paul Jungmann, Jeffrey B. Johnson, Eduardo C. Silva, William Taylor, Abdul Hanan Khan, Akash Kumar
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. 36:268-278
ISSN:	1558-2345 0894-6507
DOI:	10.1109/tsm.2023.3240033
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::28e0849c6d2ed46f613088c16dc62703 https://doi.org/10.1109/tsm.2023.3240033 Zobrazit plný text záznamu