Performance data from the EBES4 high-speed reticle generator

Autor:	William P. Wilson, A. R. von Neida, D. C. Fowlis, Herbert A. Waggener, Darryl Peters, C. M. Rose
Rok vydání:	1993
Předmět:	Materials science Optics Signal-to-noise ratio (imaging) business.industry Scanning electron microscope Reticle Electrical engineering Flux business Beam (structure) Metrology Electron gun Common emitter
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.142146
Popis:	Performance specifications, electron gun parameters, testing results to date, and throughput are presented for the second prototype EBES4 which is entering manufacture. The thermal field emitter electron gun is designed for high flux, high current stability, and a long lifetime. The gun produces 250 nA into a 125 nm diameter spot for a flux of 2000 A/cm2 with a beam current drift of
Databáze:	OpenAIRE
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