Optimization of Shallow Trench Isolation CD micro loading in advance CMOS

Autor:	Guang Yang, Zhong-Wei Jiang, Jian-Kun Zhang, null Xiayu-Shi, Su-Sheng Chang, Yang Liu, Ying-Yi Chen, Zhong-Ning Guo, Xian-Wen Su, Xin-Wen Huang, Bing-Hui Lin
Rok vydání:	2022
Zdroj:	2022 China Semiconductor Technology International Conference (CSTIC).
DOI:	10.1109/cstic55103.2022.9856826
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::287010ce431446bd45ddb2f55cf29b1b https://doi.org/10.1109/cstic55103.2022.9856826 Zobrazit plný text záznamu