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This talk is devoted to the analysis of different ellipsometric methods for their ability to get separately thickness and refractive index of thin films. Such analysis is necessary for unambiguous determination of all thin film parameters, not only its 'optical thickness.' Analysis and comparison of different approaches for solving of this problem is made both on the base of the theoretical consideration of methods background and on the calculation of correlation matrix for parameters of interest.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
