On the deposition mechanisms and the formation of glassy Cu–Zr thin films

Autor:	Ph. Komninou, G.A. Evangelakis, Grigorios Matenoglou, Panos Patsalas, Constantine Kosmidis, G.A. Almyras
Rok vydání:	2010
Předmět:	Carbon film Materials science Sputtering Physical vapor deposition Analytical chemistry General Physics and Astronomy Sputter deposition Thin film Nanocrystalline material Pulsed laser deposition Amorphous solid
Zdroj:	Journal of Applied Physics. 107:084313
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.3366715
Popis:	We report on molecular dynamics (MD) simulations and physical vapor deposition experimental results concerning the development of glassy and nanocrystalline Cu–Zr thin films. MD has revealed that when Cu and Zr are deposited sequentially, a thin film overlayer is formed that consists of nanocrystalline a-Zr and t-Zr2Cu, while if Cu and Zr are simultaneously deposited, amorphous CuZr thin film emerges, due to the formation of icosahedral-like clusters that impede nucleation. Thin films grown by pulsed laser deposition and magnetron sputtering techniques were analyzed by x-ray diffraction and high-resolution transmission electron microscopy and yielded unequivocal evidence that validates our MD predictions. These findings may indicate an alternative pathway for the growth of metallic nanocomposites or glassy films.
Databáze:	OpenAIRE
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