Material removal energy in ultraprecision machining of micro-lens arrays on single crystal silicon by slow tool servo

Autor:	Zejia Zhao, Tengfei Yin, Suet To, Zhiwei Zhu, Zhuoxuan Zhuang
Rok vydání:	2022
Předmět:	Renewable Energy Sustainability and the Environment Strategy and Management Building and Construction Industrial and Manufacturing Engineering General Environmental Science
Zdroj:	Journal of Cleaner Production. 335:130295
ISSN:	0959-6526
DOI:	10.1016/j.jclepro.2021.130295
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::22e6070ddc3720271239a2aa047d4ca6 https://doi.org/10.1016/j.jclepro.2021.130295 Zobrazit plný text záznamu Full Text from ScienceDirect