Development of high throughput adhesive bonding scheme by wafer-level underfill for 3D die-to-interposer stacking with 30µm-pitch micro interconnections

Autor: Chau-Jie Zhan, Yu-Min Lin, Ren-Shin Cheng, Jing-Ye Juang, Chia-Wen Fan, Su-Yu Fun, Tao-Chih Chang, Su-Ching Chung, Shi-Yi Huang, Yu-Wei Huang
Rok vydání: 2015
Předmět:
Zdroj: 2015 IEEE 65th Electronic Components and Technology Conference (ECTC).
DOI: 10.1109/ectc.2015.7159636
Popis: In 3D integration, die stacking together with underfilling by capillary-type underfill are the principal processes within whole conventional assembly process. How to integrate and shorten the total process steps during assembly and increase the die-stacking yield especially for thin die stack to improve the throughput that can meet the requirement from industry will be a crucial issue. In this investigation, we proposed the high throughput adhesive bonding scheme by using wafer-level underfill material for the die-to-interposer stacking with 30µm-pitch micro interconnections. The reliability characterization of the die-to-interposer stack by such bonding scheme was implemented and confirmed.
Databáze: OpenAIRE