Novel on-chip high-Q power inductor for high-efficient PowerSoC Applications

Autor: Ravinder Pal Singh, Zishan Ali Syed Mohammed, Lulu Peng, Chor Shu Cheng, Don Disney, Salahuddin Raju, Chui King Jien, Lawrence Selvaraj, Serine Soh
Rok vydání: 2019
Předmět:
Zdroj: 2019 Electron Devices Technology and Manufacturing Conference (EDTM).
DOI: 10.1109/edtm.2019.8731263
Popis: In this paper, novel on-chip inductors with thick copper and thick magnetic core are designed and fabricated. With improved magnetic core lamination and thicker Cu layers, these inductors have achieved a high Q factor of 21.1 at 20MHz, as well as a high L/R dc of 420nH/ohm, which is the best-known reported Q factor and L/R dc for on-chip inductors of large inductances (>100nH).
Databáze: OpenAIRE