Mechanisms of Heavy Ion-Induced Single Event Burnout in 4H-SiC Power MOSFETs

Autor: Andrew A. Woodworth, Collin Hitchcock, T. Paul Chow, Joseph A. McPherson, Wei Ji
Rok vydání: 2020
Předmět:
Zdroj: Materials Science Forum. 1004:889-896
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/msf.1004.889
Popis: This paper describes the mechanisms behind the failure of silicon carbide (SiC) Power MOSFETs (metal oxide semiconductor field effect transistors) when struck by a heavy ion. The modeled device is designed to simulate a commercially available 1200 V power MOSFET under the strike of a silver ion with a Linear Energy Transfer (LET) of 46 MeV-cm2/mg commonly used in single event effect (SEE) testing. The device is shown in simulation to fail near 500 V, which is in close agreement to experiments. The failure occurs near the interface between the epitaxial layer and the substrate layer due to the rapid increase of the electric field in that region and destruction of the device from impact ionization. Two improved designs were proposed and investigated that would help to mitigate the electric field in these regions and improve the device’s tolerance to single-event burnout (SEB). The new designs increased the voltage at which SEB occurs from 500 V to over 900 V and increased the specific on-resistance (Ron,sp) by only 5%.
Databáze: OpenAIRE