Design, Fabrication, and Characterization of Package Embedded Solenoidal Magnetic Core Inductors for High-Efficiency System-In-Package Integrated Voltage Regulators
| Autor: | Madhavan Swaminathan, Paul A. Kohl, S. Sandler, Anto Kavungal Davis, Mohamed Lamine Faycal Bellaredj |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry Voltage regulator Inductor 01 natural sciences Electronic Optical and Magnetic Materials Inductance System in package Magnetic core Saturation current Electromagnetic coil 0103 physical sciences Ferrite (magnet) Optoelectronics Electrical and Electronic Engineering business |
| Zdroj: | IEEE Transactions on Magnetics. 55:1-7 |
| ISSN: | 1941-0069 0018-9464 |
| DOI: | 10.1109/tmag.2019.2901780 |
| Popis: | In this paper, we discuss the design, fabrication, and characterization of package embedded solenoidal inductor using a NiZn ferrite magnetic core material based on the novel fabrication process. The process relies on stencil printing of the magnetic core material along with the photolithography and copper electroplating of the inductor’s traces. The electrical parameters of the fabricated inductors were extracted using a pi-equivalent circuit and showed an average dc resistance of 29 $\text{m}\Omega $ , an inductance of 26 nH, and an ac resistance of $2.62~\Omega $ at 100 MHz, which represents the targeted switching frequency of the system-in-package integrated voltage regulator. The organic substrate parasitic effects were accounted for through the extraction of an average shunt capacitance of 1.2 pF and an average parasitic conductance of 0.12 mS at 100 MHz. The measured 10% saturation current of the inductor was 9.6 A. The electrical parameters of the fabricated inductors were modeled and showed a good agreement with the measured data. |
| Databáze: | OpenAIRE |
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