Autor: |
Won-June Lee, Dipjyoti Das, Seungbum Hong, WooJun Seol, Hoon Kim, Tae Yeon Kim, Jun Young Lee, Ji Young Jo, Gopinathan Anoop, Myung-Han Yoon, Sanghun Jeon, Jiwon Yeom, Hyunjin Joh |
Rok vydání: |
2021 |
Předmět: |
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Zdroj: |
ACS Applied Electronic Materials. 3:1244-1251 |
ISSN: |
2637-6113 |
DOI: |
10.1021/acsaelm.0c01065 |
Popis: |
Low-temperature deposition of inorganic ferroelectric (FE) thin films is highly demanded for lowering the environmental impact through lesser energy consumption. Doped HfO2-based FE thin films comm... |
Databáze: |
OpenAIRE |
Externí odkaz: |
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