Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl

Autor:	P.A. Lane, C. L. Reeves, Brian Cockayne, Peter J. Wright, A.D. Pitt, P.E. Oliver
Rok vydání:	1998
Předmět:	Metal Materials science chemistry Process Chemistry and Technology visual_art Inorganic chemistry visual_art.visual_art_medium chemistry.chemical_element Surfaces and Interfaces General Chemistry Thin film Cobalt
Zdroj:	Chemical Vapor Deposition. :183-186
ISSN:	1521-3862 0948-1907
DOI:	10.1002/(sici)1521-3862(199810)04:05<183::aid-cvde183>3.0.co;2-m
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1b1491694fb4f567b339557f6a5f02fe https://doi.org/10.1002/(sici)1521-3862(199810)04:05<183::aid-cvde183>3.0.co Zobrazit plný text záznamu Plný text