The Topography of Surface and Light Transmission by Quartz Windows after Exposure in a High-Frequency Discharge in Deuterium and Mixture of Deuterium with Nitrogen
| Autor: | A.V. Markin, E.E. Mukhin, V. L. Bukhovets, A.E. Gorodetsky, A.G. Razdobarin, N.A. Babinov, V. I. Zolotarevsky, R. Kh. Zalavutdinov, A. M. Dmitriev |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Technical Physics. 66:288-297 |
| ISSN: | 1090-6525 1063-7842 |
| Popis: | The effect of a high-frequency discharge on the change in the topography of the surface of KU-1 optical quartz and transmission of visible light (400–1000 nm) is studied. The working gases of the discharge are D2 and a D2/N2 mixture, in which the fraction of N2 is 25 mol %. The addition of nitrogen increases the rate of sputtering from 60 to 300 nm/h without changing the stoichiometry of the surface layers. After the exposure in plasma, the root-mean-square roughness of the surface decreases from 1.3 to 0.6 nm. The transparence of quartz remains unchanged. The analysis of the roughness and calculation of the diffuse light scattering with a wavelength of 400 nm after passing through quartz are executed using the power spectral density functions. |
| Databáze: | OpenAIRE |
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