X-ray phase analysis with depth profiling for thin films
| Autor: | D.Y. Yu, L.J. Weng, Q.Z. Cong, Fangqing Zhang |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Profiling (computer programming)
Diffraction Materials science business.industry Metals and Alloys X-ray Bragg's law Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials Azimuth Optics Materials Chemistry Thin film business Intensity (heat transfer) Diffractometer |
| Zdroj: | Thin Solid Films. 213:13-18 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/0040-6090(92)90468-q |
| Popis: | A conventional X-ray diffractometer with a sample tilting X-ray diffraction (STD) mode is a useful tool which can better characterize the phase composition of films from 100 A to a few micrometers thick with random or preferred orientations. In this paper equations of an asymmetrical Bragg reflection intensity and the observed crystal plane azimuthal angle are given, and it is shown through a few examples that this STD technique can be used to solve some problems related to phase analysis with depth profiling for thin films. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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