Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications
| Autor: | Bruno Guillet, Jean-Claude Villegier, Michel Chaubet, Frédéric Houzé, Annick F. Dégardin, Alain J. Kreisler |
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| Rok vydání: | 2005 |
| Předmět: |
Materials science
business.industry Terahertz radiation Bolometer Schottky diode 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences law.invention law 0103 physical sciences Extremely high frequency Optoelectronics Photolithography 010306 general physics 0210 nano-technology business Electron-beam lithography Diode |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | Superconducting Hot Electron Bolometer (HEB) mixers are a competitive alternative to Schottky diode mixers or other conventional superconducting receiver technologies in the terahertz frequency range because of their ultrawide bandwidth (from millimeter waves to the visible), high conversion gain, and low intrinsic noise level, even at 77 K. A new technological process has been developed to realize HEB mixers based on high temperature superconducting materials, using 15 to 40 nm thick layers of YBa 2 Cu 3 O 7-δ (YBCO), sputtered on MgO (100) substrates by hollow cathode magnetron sputtering. Critical temperature values of YBCO films were found in the 85 to 91 K range. Sub-micron HEB bridges (0.8 μm x 0.8 μm) were obtained by combining electronic and UV lithography followed by selective etching techniques. Realization of YBCO HEB coupling to planar integrated gold antennas was also considered. |
| Databáze: | OpenAIRE |
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