Deposition of (100) oriented MgO thin films on sapphire by a spray pyrolysis method

Autor:	W. J. DeSisto, R. L. Henry
Rok vydání:	1990
Předmět:	Materials science Physics and Astronomy (miscellaneous) Silicon Annealing (metallurgy) Scanning electron microscope Magnesium chemistry.chemical_element Mineralogy chemistry Chemical engineering Vacuum deposition Sapphire Thin film Pyrolysis
Zdroj:	Applied Physics Letters. 56:2522-2523
ISSN:	1077-3118 0003-6951
Popis:	Thin films of magnesia have been deposited by a novel spray pyrolysis method. An aqueous magnesium acetylacetonate solution was ultrasonically nebulized, transported in flowing oxygen, and thermally decomposed on silicon (100), sapphire, and fused silica at temperatures between 400 and 550 °C. The films were from 0.1 to 0.5 μm thick, optically transparent, and smooth. The MgO films were poorly crystalline as deposited. MgO films on sapphire crystallized with strong (100) orientation after annealing at 700 and 930 °C in flowing oxygen.
Databáze:	OpenAIRE
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