Deformable MEMS grating for wide tunability and high operating speed
| Autor: | Yves-Alain Peter, R. Stanley, Philippe Niedermann, Arno Hoogerwerf, Maurizio Tormen |
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| Rok vydání: | 2006 |
| Předmět: |
Microelectromechanical systems
Diffraction Materials science business.industry Physics::Optics Grating Laser Atomic and Molecular Physics and Optics Computer Science::Other law.invention Semiconductor laser theory Optics law Optoelectronics business Operating speed Quantum cascade laser Tunable laser |
| Zdroj: | Journal of Optics A: Pure and Applied Optics. 8:S337-S340 |
| ISSN: | 1741-3567 1464-4258 |
| DOI: | 10.1088/1464-4258/8/7/s07 |
| Popis: | In optical MEMS, the family of diffractive MEMS is interesting for a wide range of applications, such as displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. A deformable diffraction MEMS grating is presented. Electrostatic actuation has experimentally proven a periodicity tuning of 2.5%. The device first resonant mode is expected to be at 28.5 kHz. The present device has been designed as a tuning element in an external cavity mid-infrared quantum-cascade laser. |
| Databáze: | OpenAIRE |
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