Structural and Optical Properties of SiO2Thick Films by Aerosol Deposition Process

Autor: Jung-Hyuk Koh, Chan-Ik Jang
Rok vydání: 2013
Předmět:
Zdroj: Journal of the Korean Institute of Electrical and Electronic Material Engineers. 26:6-12
ISSN: 1226-7945
DOI: 10.4313/jkem.2013.26.1.6
Popis: Aerosol deposition(AD) coating that enable fabricate films at low temperature have begun to be widely researched for the integration of ceramics as well to realize high-speed deposition rates. For application of ceramic thick film by AD to display and electronic ceramic industry, fabrication of dense structure with a no cracking is required. In this study, to fabricate dense ceramic thick film, the effect of crystal phase of starting powder was investigated. For this study, amorphous and crystalline powders were used as starting powders. Two types of powders were deposited on glass substrate by AD. In the case of amorphous powder, the deposited films had extremely incompact and opaque layer, irrespective of particle size. In contrast to amorphous powder, in the case of crystalline powder, porous structure layer and dense microstructure with no cracking layer were fabricated depending on the particle size. The optimized starting powder size for dense coating layer was . The transmittance of film reached a maximum of 76% at 800 nm.
Databáze: OpenAIRE