A Fast Method of Fully Characterizing Sputtering Angular Dependence

Autor: A. C. Barrie, Lubos Brieda, Michael R. Nakles, Michael W. Gorrilla
Rok vydání: 2008
Předmět:
Zdroj: 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit.
DOI: 10.2514/6.2008-5094
Popis: A new method has been demonstrated in which a single experiment is used to fully define the sputtering angular dependence of a given material. The method subjects a circular rod of test material to a mono-energetic and highly collimated ion beam. The eroded profile is then measured using optical profilometry; the full sputtering angular dependence curve is then extracted using a numerical approach.
Databáze: OpenAIRE