Research on interferometric inspection of surface topography of ring elements

Autor:	Jun Cheng, Sen Han, Xiaoyue Bian, Xianyu Wu, Xianhao Qi, Linghua Zhang, Qiang Cheng
Rok vydání:	2022
Zdroj:	Optical Metrology and Inspection for Industrial Applications IX.
DOI:	10.1117/12.2643403
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1124da09ac4297c218c469eca6904040 https://doi.org/10.1117/12.2643403 Zobrazit plný text záznamu