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The polymers ablation by a Q-switched C02 laser is demonstrated and compared with that of the conventionalTEA laser ablation. The 20 - 100 m depth ablative etching of PET with well defined edge were successfully obtainedwhen the strong absorbed 9R(20) line at 1078.57cm1was irradiated. It was found the ablation characteristics by a Q-switched laser was almost same as that by a TEA laser.Keywords: Q-switched C02 laser, Ablation, Organic polymers, Laser materials processing 1. INTRODUCTION Since early works of laser ablation using excimer laser 2, lot of studies focused on its mechanism have beenreported. Many applications such as micro-machining of polymers, surface cleaning of solid and superconducting thin-filmdeposition are expected by using a laser ablation. Most of organic polymers show the strong absorption in IR region aswell as in UV region, the pulsed C02 laser can also ablate these materials successfully. In order to avoid the thermaldamage, a short duration and high peak power pulse is preferable for laser ablation. Therefore, TEA C02 laser was adoptedfor the IR laser ablation studies35. Werner and Schweizer reported the paint stripping of aircraft using commerciallyavailable TEA C02 laser of 2kW average power3. Brannon and Lankard studied the ablative etching of Polyimide, which isthe insulating material for micro-electronic device, using a tunable TEA C02 laser. They pointed out that Polyimide can beetched clearly and precisely by selecting the proper C02 laser line at strong absorption band4.For the industrial applications of the laser ablations, it requires a high average power (pulse repetition frequency |
