Nitrogen depletion of indium nitride films during Elastic Recoil Detection analysis

Autor:	P.P.-T. Chen, Santosh Shrestha, Heiko Timmers, K. Scott A. Butcher, M. Wintrebert-Fouquet
Rok vydání:	2005
Předmět:	Nuclear and High Energy Physics Materials science Indium nitride Ion beam analysis Analytical chemistry chemistry.chemical_element Nitrogen Ion Elastic recoil detection chemistry.chemical_compound Recoil chemistry Ionization Instrumentation Stoichiometry
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 234:291-307
ISSN:	0168-583X
Popis:	Elastic Recoil Detection analysis of different types of indium nitride films has been performed using a 200 MeV Au beam. Recoil ions were detected with a gas ionisation detector featuring a large detection solid angle. Severe and non-linear nitrogen depletion has been observed, with films grown by RF-sputtering losing nitrogen more quickly than MBE-grown films. Assuming the formation of molecular nitrogen as the decisive step leading to nitrogen loss, the nitrogen depletion process has been modelled using the bulk molecular recombination model. The model allows accurate extrapolations of the original nitrogen content of the material. Since the other important elements can also be quantified, the stoichiometry of the film can thus reliably be obtained from Elastic Recoil Detection analysis. All the films analysed have been found to have excess nitrogen.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0d8eab6811f47b117b2556cec10abb7e https://doi.org/10.1016/j.nimb.2005.01.022 Zobrazit plný text záznamu Full Text from ScienceDirect