High Quality SiC Substrates for Semiconductor Devices: From Research to Industrial Production
| Autor: | D.P. Malta, H. McD. Hobgood, M.F. Brady, Valeri F. Tsvetkov, S.T. Allen, Jason Ronald Jenny, R.C. Glass, D. Henshall, William H Brixius, John W. Palmour, Calvin H. Carter, R.T. Leonard, Stephan G. Müller, Adrian Powell, G. Fechko |
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| Rok vydání: | 2002 |
| Předmět: |
Materials science
Mechanical Engineering media_common.quotation_subject Industrial production Semiconductor device Condensed Matter Physics Engineering physics Micropipe Mechanics of Materials Electrical resistivity and conductivity Electronic engineering General Materials Science Quality (business) media_common |
| Zdroj: | Materials Science Forum. :23-28 |
| ISSN: | 1662-9752 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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